Dynamic Behavior of MEMS Resonators

Applied Mechanics and Materials 2014 / 10 Vol. 658

Dynamic Behavior of MEMS Resonators

Pustan, Marius, Birleanu, Corina, Rusu, Florina, Haragas, Simion
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Volume:
658
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.658.694
Date:
October, 2014
File:
PDF, 976 KB
english, 2014
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