Heating Effect on the Qualities of Cr-Zr-N Thin Films by...

Advanced Materials Research 2012 / 3 Vol. 488-489

Heating Effect on the Qualities of Cr-Zr-N Thin Films by Increasing in Zr Sputtering Current

Chantharangsi, Chirawat, Denchitcharoen, Somyod, Chaiyakun, Surasing, Limsuwan, Pichet
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Volume:
488-489
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.488-489.67
Date:
March, 2012
File:
PDF, 333 KB
english, 2012
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