Parametric Study and Thickness Evaluation of Photoresist...

Advanced Materials Research 2012 / 12 Vol. 626

Parametric Study and Thickness Evaluation of Photoresist Development for the Formation of Microgap Electrodes Using Surface Nanoprofiler

Humayun, Q., Hashim, U.
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Volume:
626
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.626.942
Date:
December, 2012
File:
PDF, 1.16 MB
english, 2012
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