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Surface Morphology and Structural Investigation of TiN Nanocrystal Thin Films Grown with Different N2 Concentration
Jiramongkolsiri, Udom, Thanomngam, Pitiporn, Pankiew, Apirak, Porntheerapat, Supanit, Nukeaw, JitiVolume:
651
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.651.91
Date:
January, 2013
File:
PDF, 504 KB
english, 2013