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Negative Pattern Scheme (NPS) Design for Nanowire Formation Using Scanning Electron Microscope Based Electron Beam Lithography Technique
Md Nor, Mohammad Nuzaihan, Hashim, Uda, Abdul Rahman, Siti Fatimah, Adam, TijjaniVolume:
832
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.832.419
Date:
November, 2013
File:
PDF, 371 KB
english, 2013