Negative Pattern Scheme (NPS) Design for Nanowire Formation...

Negative Pattern Scheme (NPS) Design for Nanowire Formation Using Scanning Electron Microscope Based Electron Beam Lithography Technique

Md Nor, Mohammad Nuzaihan, Hashim, Uda, Abdul Rahman, Siti Fatimah, Adam, Tijjani
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Volume:
832
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.832.419
Date:
November, 2013
File:
PDF, 371 KB
english, 2013
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