Simulation of MEMS Capacitive Thermal Sensor Based on Tip...

Advanced Materials Research 2013 / 12 Vol. 845

Simulation of MEMS Capacitive Thermal Sensor Based on Tip Deflection of a Functionally Graded Micro-Beam

Ghadim, Mohammad Abbasgholipour, Mailah, Musa, Mohammadi-Alasti, Behzad, Ghadim, Mehdi Abbasgholipour
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Volume:
845
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.845.340
Date:
December, 2013
File:
PDF, 486 KB
english, 2013
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