Fabrication of a Large-Area Silicon Mold with...

Key Engineering Materials 2010 / 6 Vol. 443

Fabrication of a Large-Area Silicon Mold with Microstructures Using a Novel Recombining Technique

Wu, Chih Wei, Chi, Chih Heng, Tsai, Hung Yin, Shen, Yung Kang
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Volume:
443
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.443.213
Date:
June, 2010
File:
PDF, 2.39 MB
english, 2010
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