Smoothness Control of Wet Etched Si{100} Surfaces in TMAH+Triton
Tang, Bin, Yao, Ming Qiu, Tan, Gang, Pal, Prem, Sato, Kazuo, Su, WeiVolume:
609-610
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.609-610.536
Date:
April, 2014
File:
PDF, 1.93 MB
english, 2014