Study of Ge–Sb–Te and Ge–Te cocktail sources to improve an...

Materials Science in Semiconductor Processing 2015 / 12 Vol. 40

Study of Ge–Sb–Te and Ge–Te cocktail sources to improve an efficiency of multi-line CVD for phase change memory

Jeong, Jin Hwan, Park, Jun Hyuk, Lee, Yeong Min, Hwang, Uk, Kim, Hyung Keun, Kil, Deok Sin, Choi, Doo Jin
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Volume:
40
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.06.027
Date:
December, 2015
File:
PDF, 2.14 MB
english, 2015
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