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Static/dynamic trade-off performance of PZT thick film micro-actuators
Bienaimé, Alex, Chalvet, Vincent, Clévy, Cédric, Gauthier-Manuel, Ludovic, Baron, Thomas, Rakotondrabe, MickyVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/7/075017
Date:
July, 2015
File:
PDF, 1.13 MB
english, 2015