A Piezoelectric Micropump Based on MEMS Fabrication

Key Engineering Materials 2008 Vol. 368-372

A Piezoelectric Micropump Based on MEMS Fabrication

Wang, Bao Wei, Chua, Xiang Cheng, Li, Long Tu
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Volume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.368-372.215
File:
PDF, 981 KB
english, 2008
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