Silicon nanowire growth on Si and SiO 2 substrates by rf magnetron sputtering in Ar/H 2
Yamada, Ikumi, Hirano, Yutaro, Nishimura, Kenkichi, Takao, Yoshinori, Eriguchi, Koji, Ono, KouichiVolume:
8
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/apex.8.066201
Date:
June, 2015
File:
PDF, 2.98 MB
english, 2015