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Design and fabrication of differently shaped pyramids on Si{100} by anisotropic wet etching
Imaeda, Kodai, Bessho, Katsuhiko, Shikida, MitsuhiroVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2590-8
Date:
December, 2016
File:
PDF, 2.56 MB
english, 2016