A micro interdigitated thin film metal oxide capacitive...

Sensors and Actuators B: Chemical 2015 / 12 Vol. 221

A micro interdigitated thin film metal oxide capacitive sensor for measuring moisture in the range of 175–625ppm

Islam, Tarikul, Nimal, A.T., Mittal, Upendra, Sharma, M.U.
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Volume:
221
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2015.06.101
Date:
December, 2015
File:
PDF, 1.95 MB
english, 2015
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