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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Effect of Copper CMP Slurry Chemistry on the Rate of Agglomeration of Alumina Particles
Brahma, Neil, Chan, Mike, Talbot, JanYear:
2009
Language:
english
DOI:
10.1149/1.3123771
File:
PDF, 327 KB
english, 2009