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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - CMP Solutions for the Integration of High-K Metal Gate Technologies
Dysard, Jeffrey M., Brusic, Vlasta, Feeney, Paul, Grumbine, Steven, Moeggenborg, Kevin, Whitener, Glenn, Ward, William, Burns, Gregory, Choi, KyoseYear:
2010
Language:
english
DOI:
10.1149/1.3489048
File:
PDF, 1.28 MB
english, 2010