Structural Investigation of Si Quantum Dots Grown by CVD on AlN/Si(111) and 3C-SiC/Si(100) Epilayers
Dagher, Roy, Khazaka, Rami, Vézian, Stephane, Teissiere, Monique, Michon, Adrien, Zielinski, Marcin, Chassagne, Thierry, Cordier, Yvon, Portail, MarcVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.1003
Date:
June, 2015
File:
PDF, 391 KB
english, 2015