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SPIE Proceedings [SPIE Integrated Optoelectronics '94 - Lindau, Federal Republic of Germany (Sunday 10 April 1994)] Nanofabrication Technologies and Device Integration - Super resolution lithography using a direct-write laser pattern generator
Wijnaendts van Resandt, Roelof W., Buchner, Christian F., Karthe, WolfgangVolume:
2213
Year:
1994
Language:
english
DOI:
10.1117/12.180969
File:
PDF, 240 KB
english, 1994