SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Smart sensors and calibration standards for high precision metrology
Sánchez-Rojas, José Luis, Brama, Riccardo, Brand, Uwe, Gao, Sai, Doering, Lutz, Li, Zhi, Xu, Min, Buetefisch, Sebastian, Peiner, Erwin, Fruehauf, Joachim, Hiller, KarlaVolume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2179455
File:
PDF, 2.55 MB
english, 2015