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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - MOEMS integrated optical monitoring
Hornak, Lawrence A., Famouri, Parviz F., Dawson, Jeremy M., Wang, Limin, Ghaffarian, Reza, Motamedi, M. Edward, Goering, RolfVolume:
4561
Year:
2001
Language:
english
DOI:
10.1117/12.443089
File:
PDF, 978 KB
english, 2001