[ECS 208th ECS Meeting - Los Angeles, California (October...

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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Threshold Voltage Control in PMOSFETs with Polysilicon or Fully-Silicided Gates on Hf-Based Gate Dielectric Using Controlled Lateral Oxidation

Kaushik, Vidya S., Rohr, Erika, Hyun, Sangjin, De Gendt, Stefan, Van Elshocht, Sven, Delabie, Annelies, Everaert, Jean-Luc, Veloso, Anabela, Brus, Stephan, Ragnarsson, Lars-Ake, Richard, Olivier, Caym
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Volume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209279
File:
PDF, 377 KB
english, 2006
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