ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Challenges and Mechanisms of CMP Slurries for 32nm and Beyond
Morinaga, Hitoshi, Tamai, KazuseiYear:
2011
Language:
english
DOI:
10.1149/1.3567643
File:
PDF, 1.08 MB
english, 2011