Research on titanium nitride thin films deposited by...

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Applied Surface Science 2015 / 7

Research on titanium nitride thin films deposited by reactive magnetron sputtering for MEMS applications

Merie, Violeta, Pustan, Marius, Negrea, Gavril, Bîrleanu, Corina
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.07.063
Date:
July, 2015
File:
PDF, 2.14 MB
english, 2015
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