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Langmuir probe measurements of weakly collisional electronegative RF discharge plasmas
Bryant, Paul, Dyson, Anthony, Allen, John EVolume:
34
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/34/1/316
Date:
January, 2001
File:
PDF, 152 KB
english, 2001