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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Design, modeling and verification of MEMS silicon torsion mirror
Pan, F., Kubby, Joel A., Peeters, Eric, Chen, Jingkuang, Vitomirov, Olivera, Taylor, D., Mukherjee, Subrata, Motamedi, M. Edward, Herzig, Hans PeterVolume:
3226
Year:
1997
Language:
english
DOI:
10.1117/12.284559
File:
PDF, 1.05 MB
english, 1997