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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Photon Processing in Microelectronics and Photonics V - Micro/nanoscale surface modification and structuring using lasers
Lu, Y. F., Okada, Tatsuo, Arnold, Craig B., Meunier, Michel, Holmes, Andrew S., Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6106
Year:
2006
Language:
english
DOI:
10.1117/12.658302
File:
PDF, 1.69 MB
english, 2006