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[ECS ISTC/CSTIC 2009 (CISTC) - Shanghai, China (March 19 - March 20, 2009)] ECS Transactions - High-Accuracy Measurement of Coma with the Optimized Alternating Phase-shifting Mask with a Specific Phase Width
Qiu, Zicheng, Wang, Xiangzhao, Yuan, Qiongyan, Wang, FanYear:
2009
Language:
english
DOI:
10.1149/1.3096475
File:
PDF, 456 KB
english, 2009