Dimensionelle Metrologie an ebenen Substraten mit Mikro-...

tm - Technisches Messen 2009 / 01 Vol. 76; Iss. 2

Dimensionelle Metrologie an ebenen Substraten mit Mikro- und NanostrukturenDimensional Metrology on Plane Substrates with Micro- and Nanostructures

Bosse, Harald, Flügge, Jens, Köning, Rainer, Frase, Carl Georg, Häßler-Grohne, Wolfgang, Just, Andreas, Geckeler, Ralf
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Volume:
76
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2009.0923
Date:
January, 2009
File:
PDF, 1.00 MB
2009
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