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One-Step Cleaning Solution to Replace the Conventional RCA Two-Step Cleaning Recipe for Pregate Oxide Cleaning
Pan, Tung Ming, Lei, Tan Fu, Chao, Tien Sheng, Liaw, Ming Chi, Ko, Fu Hsiang, Lu, Chih PengVolume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1369374
File:
PDF, 254 KB
english, 2001