Plasma-Damage-Induced Leakage Prevention Using Ozone...

Plasma-Damage-Induced Leakage Prevention Using Ozone Followed by SPM Solution Cleaning for Ion-Implanted Photoresist Strip

Mun, Seong Yeol, Shin, Kyeong Cheol, Choi, Woon Il, Kim, Jae Young, Kim, Dae Byung, Kang, Seong Jun, Jeong, Yang Hee
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2358859
File:
PDF, 201 KB
english, 2006
Conversion to is in progress
Conversion to is failed