Tuning effect of inert gas mixing on electron energy...

Plasma Physics and Controlled Fusion 2006 / 01 Vol. 48; Iss. 1

Tuning effect of inert gas mixing on electron energy distribution function in inductively coupled discharges

Pu, Yi-Kang, Guo, Zhi-Gang, Aman-ur-Rehman,, Yu, Zhen-Dong, Ma, Jie
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Volume:
48
Language:
english
Journal:
Plasma Physics and Controlled Fusion
DOI:
10.1088/0741-3335/48/1/006
Date:
January, 2006
File:
PDF, 175 KB
english, 2006
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