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SPIE Proceedings [SPIE 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China (Wednesday 19 November 2008)] 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Study on deposition of amorphous hydrogenate DLC films on germanium substrates by RF-PECVD
Tang, Ji-long, Liu, Guo-jun, Wang, Jing, Wu, Zhi-chao, Zhao, Ying-jie, Fu, Xiu-hua, Yang, Li, Schoen, John M., Namba, Yoshiharu, Li, ShengyiVolume:
7282
Year:
2009
Language:
english
DOI:
10.1117/12.831005
File:
PDF, 349 KB
english, 2009