Optical and Mechanical Properties of Hard Hydrogenated Amorphous Carbon Films Deposited by Plasma CVD
Yokoyama, Haruki, Okamoto, Masaki, Yamasaki, Toshifumi, Takahiro, Katsumi, Osaka, Yukio, Imura, TakeshiVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.2815
Date:
December, 1990
File:
PDF, 714 KB
1990