Improvement of Gap-Filling Property of O 3...

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 2, No

Improvement of Gap-Filling Property of O 3 -tetraethylorthosilicate (TEOS) Film by Ethanol Surface Treatment

Sato, Nobuyoshi, Nakano, Tadashi, Yamamoto, Hiroshi, Ohta, Tomohiro
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L110
Date:
January, 1993
File:
PDF, 1.58 MB
1993
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