Ein Differential-Interferometer mit konfokalem...

Ein Differential-Interferometer mit konfokalem Positionssensor zum Messen kleinster Verschiebungen eines stark gekrümmten Prüflings (A Differential Interferometer with Confocal Position Sensor for the Measurement of Very Small Displacements of an Object with Narrow Curvature)

Li, Zhi, Herrmann, Konrad, Pohlenz, Frank, Popadic, Radovan
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Volume:
72
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2005.72.10_2005.549
Date:
January, 2005
File:
PDF, 7.46 MB
german, 2005
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