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[Journal of the Physical Society of Japan Proceedings of the 12th Asia Pacific Physics Conference (APPC12) - Makuhari, Japan (July 14–19, 2013)] Proceedings of the 12th Asia Pacific Physics Conference (APPC12) - Enhanced Deposition Efficiency of Epitaxial Si Film from SiHCl 3 by Mesoplasma Chemical Vapor Deposition
Wu, Sudong, Kambara, Makoto, Yoshida, ToyonobuYear:
2014
Language:
english
DOI:
10.7566/JPSCP.1.015068
File:
PDF, 814 KB
english, 2014