![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE's 7th Annual International Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 6 March 2000)] Smart Structures and Materials 2000: Smart Electronics and MEMS - Novel silicon cap package technology for monolithic microinertial measurement unit
Li, Zhihong, Zhang, Dacheng, Hao, Yilong, Li, Ting, Wang, Ying, Wu, Guoying, Varadan, Vijay K.Volume:
3990
Year:
2000
Language:
english
DOI:
10.1117/12.388914
File:
PDF, 2.41 MB
english, 2000