Effect of Additives in Organic Acid Solutions for Post-CMP...

Journal of The Electrochemical Society 2009 Vol. 156; Iss. 6

Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon

Gu, Xun, Nemoto, Takenao, Teramoto, Akinobu, Ito, Takashi, Ohmi, Tadahiro
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Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3106106
File:
PDF, 1.11 MB
english, 2009
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