Drive-mode control for an underactuated MEMS vibratory rate gyroscope
He, Guangping, Zhang, Chenghao, Sun, Wei, Zhao, QuanliangVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2582-8
Date:
May, 2016
File:
PDF, 1.07 MB
english, 2016