A novel ultra-planar, long-stroke and low-voltage...

Journal of Micromechanics and Microengineering 2010 / 06 Vol. 20; Iss. 6

A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

Bakke, Thor, Vogl, Andreas, Żero, Oleg, Tyholdt, Frode, Johansen, Ib-Rune, Wang, Dag
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/6/064010
Date:
June, 2010
File:
PDF, 609 KB
english, 2010
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