SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Effect of oxygen implantation on the characteristic of Ge2Sb2Te5 phase change film
Liu, Bo, Song, Zhitang, Zhang, Ting, Feng, Songlin, Chen, Bomy, Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607329
File:
PDF, 230 KB
english, 2012