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Photoluminescence Study of Oxidation-Induced Stacking Faults in 4H-SiC Epilayers
Miyano, Yutaro, Yagi, Shuhei, Hijikata, Yasuto, Yaguchi, HiroyukiVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.327
Date:
June, 2015
File:
PDF, 394 KB
english, 2015