Fabrication of Large-Area Hierarchical Structure Array...

ACS Applied Materials & Interfaces 2015 / 06 Vol. 7; Iss. 24

Fabrication of Large-Area Hierarchical Structure Array Using Siliconized-Silsesquioxane as a Nanoscale Etching Barrier

Lee, Bong Kuk, Baek, In-Bok, Kim, Yarkyeon, Jang, Won Ick, Yoon, Yong Sun, Yu, Han Young
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Volume:
7
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.5b02673
Date:
June, 2015
File:
PDF, 1.88 MB
english, 2015
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