[ACS Symposium Series] Micro- and Nanopatterning Polymers...

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[ACS Symposium Series] Micro- and Nanopatterning Polymers Volume 706 || Exploration of Chemically Amplified Resist Mechanisms and Performance at Small Linewidths

Ito, Hiroshi, Reichmanis, Elsa, Nalamasu, Omkaram, Ueno, Takumi
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Volume:
10.1021/bk
Year:
1998
Language:
english
DOI:
10.1021/bk-1998-0706.ch011
File:
PDF, 871 KB
english, 1998
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