[ACS Symposium Series] Micro- and Nanopatterning Polymers Volume 706 || Exploration of Chemically Amplified Resist Mechanisms and Performance at Small Linewidths
Ito, Hiroshi, Reichmanis, Elsa, Nalamasu, Omkaram, Ueno, TakumiVolume:
10.1021/bk
Year:
1998
Language:
english
DOI:
10.1021/bk-1998-0706.ch011
File:
PDF, 871 KB
english, 1998