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Design, fabrication and measurement of a novel 140 GHz folded waveguide based on SU-8 UV-LIGA technology
Xie, Fuqiang, Ding, Guifu, Zhao, Xiaolin, Cheng, PingVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/8/085010
Date:
August, 2015
File:
PDF, 2.69 MB
english, 2015