Effect of Nitrogen Implantation with Low Dose on Thermomechanical Properties and Microstructure of Ge 2 Sb 2 Te 5 Films
Park, Il-Mok, Jung, Jung-Kyu, Yang, Tae-Youl, Yeom, Min Soo, Kim, Yong Tae, Joo, Young-ChangVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.1491
Date:
March, 2008
File:
PDF, 320 KB
english, 2008