Analysis and modelling of plasma enhanced CVD reactors. II....

Plasma Sources Science and Technology 1994 / 02 Vol. 3; Iss. 1

Analysis and modelling of plasma enhanced CVD reactors. II. Model improvement and systematic use

Layeillon, L, Dollet, A, Couderc, J P, Despax, B
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Volume:
3
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/3/1/009
Date:
February, 1994
File:
PDF, 491 KB
english, 1994
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