Characterization of carbon contamination under ion and hot...

Applied Surface Science 2015 / 10 Vol. 353

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Dolgov, A., Lopaev, D., Lee, C.J., Zoethout, E., Medvedev, V., Yakushev, O., Bijkerk, F.
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Volume:
353
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.06.079
Date:
October, 2015
File:
PDF, 1.17 MB
english, 2015
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