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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] MOEMS and Miniaturized Systems XIV - Spatially resolved contrast measurement of diffractive micromirror arrays
Piyawattanametha, Wibool, Park, Yong-Hwa, Sicker, Cornelius, Heber, Jörg, Berndt, Dirk, Rückerl, Florian, Tinevez, Jean-Yves, Shorte, Spencer, Wagner, Michael, Schenk, HaraldVolume:
9375
Year:
2015
Language:
english
DOI:
10.1117/12.2076921
File:
PDF, 1.23 MB
english, 2015