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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] MOEMS and Miniaturized Systems XIV - Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer
Piyawattanametha, Wibool, Park, Yong-Hwa, Wang, Wei-Shan, Lullin, Justine, Froemel, Joerg, Wiemer, Maik, Bargiel, Sylwester, Passilly, Nicolas, Gorecki, Christophe, Gessner, ThomasVolume:
9375
Year:
2015
Language:
english
DOI:
10.1117/12.2077641
File:
PDF, 2.88 MB
english, 2015